Is the UHP nitrogen pure nitrogen

Catalytic nitrogen cleaner with removal of CH4

   


The nitrogen cleaners of the MegaTorr series - improved, optimized in design and with a small footprint - offer performance below the ppb range. SAES Pure Gas has many years of experience in the development of ultra-high purity (UHP) pipe systems, the analysis of complex process materials and the state-of-the-art control systems in order to develop this cleaner family while meeting the requirements of low acquisition costs, higher Reliability and high performance to match. The PS9 series gas purifiers use dual catalytic and adsorption processes, specially developed to provide high purity (UHP) gas for semiconductor applications. The contamination by CH4, CO, CO2, H2, H2O and O2 are reduced to a particle quantity below the ppb level. When the removal of CH4 is not required, the PS8 nitrogen cleaner can be used instead.
In the PS9 nitrogen cleaner, hydrocarbons (CH4), CO and H2 oxidizing with O2 or CDA and form CO2 and H2O. Both are then removed from the nitrogen in the adsorber container at ambient temperature. The adsorber tanks switch between cleaning and regeneration mode and thus guarantee continuous gas cleaning. The adsorber regeneration is completed at an elevated temperature by flushing with a mixture of purified process gas and a small amount of hydrogen. The PS9 gas cleaners are available for flow rates of 15 Nm3/ hr up to 3000 Nm3/Mr.

Standard features:
  • Automated microprocessor control
  • Touch screen user interface
  • System alarms
  • Gas to gas heat exchanger
  • Electric gas preheating system
  • Closed temperature control loops
  • All-metal housing with doors
  • Hydrogen mixing station
  • Shutdown when the maximum temperature is reached
  • Pressure compensation system in the event of overpressure
Optional features:
  • Shut-off valves at the inlet and outlet
  • Mass flow meter, 4-20mA
  • Pressure sensor at the inlet and outlet
  • Instrument Air Management System
  • Water cooling system
  • Water-cooled heat exchanger
  • Automatic or manual bypass
  • Particle filter
  • Separate control voltage
  • MODBUS data transfer connection

purified gasesremoved impuritiesOutput power
N2H2O, O2, CO, CO2, H2, CH4<1 ppb

modelMaximum flow
(Nm3/Mr)
Maximum pressure drop
(bar)
Dimensions (cm)Weight
(kg)
HB.T
PS9-MGT15 - PS9-MGT6015 - 600,71938982<600
PS9-MGT100 - PS9-MGT200100 - 2001193132135<1700
PS9-MGT300 - PS9-MGT400300 - 4001214148196<3100
PS9-MGT500 - PS9-MGT700500 - 7001237237191<3850
PS9-MGT800 - PS9-MGT1800800 - 18001266253315<6800
PS9-MGT2000 - PS9-MGT30002000 - 30001274254412<8700